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Explore the fascinating world of Silicon-Based MEMS with this comprehensive handbook. Delve into the fundamental materials and cutting-edge technologies that drive microelectromechanical systems. This book offers a detailed exploration of silicon's properties, fabrication techniques, and applications in diverse fields, including sensors, actuators, and microfluidics.

Gain insights into advanced topics such as surface micromachining, bulk micromachining, wafer bonding, and etching processes. Discover the latest advancements in MEMS design, modeling, and simulation. The handbook provides a robust foundation for understanding the principles behind these miniature marvels and their ever-expanding role in technology.

Whether you're a seasoned researcher, an aspiring engineer, or a student eager to learn, this handbook provides a valuable resource. Uncover the possibilities and challenges of silicon-based MEMS, equipping you with the knowledge to contribute to this exciting field. From material science to device integration, this book covers the essential aspects, solidifying your understanding of these intricate systems.